XYZ Autofocus Metrology Microscopes
太阳城3注册Full capability to design, manufacture and install microscope based metrology and inspection system including material handling for MEMS and/or semiconductor applications
- Infinity corrected objectives
- On axis top and bottom strobe LED lighting
- In tray inspection
- 4M pixel, 160 FPS camera, or better
- High speed processing
- LED strobe lighting, collimating optics and controllers
3D Anamorphic Imaging Lenses
Our family of 3D lenses has a wide range of inspection and metrology applications for semiconductors and electronics from BGA substrates to microbumps on silicon interposers. These lenses are tuned for laser triangulation applications and have higher magnification in vertical axis allowing much better height measuring performance, while keeping lower magnification in horizontal axis increasing field of view thus the speed.
Lasers & Line Projections Optics
太阳城3注册We typically integrate laser products with our custom collimators and high NA line projector lenses. Applications of these lenses are 3D laser triangulation for semiconductor and electronics applications. High resolution thin laser line is ideal for wafer μbumps scanning allowing sub-micron accuracy and repeatability.
Wafer bumps: Laser triangulation images and processing
High Speed 3D Camera and Processing
Custom firmware 4M pixel camera could run at over 30,000 FPS and over 2.2GB data rates for typical laser triangulation applications for semiconductor industry. Individually programmable windows allow for independent exposures. Images are transferred via CoaxExpress link to PC memory. Acquired images are processed with subpixel precision in real time on GPU. These sophisticated algorithms allow both high accuracy and repeatability of results.
太阳城3注册For high precision, high magnification application, camera - lens boresight can be adjusted as well as the camera alignment with scanning axes in object space within few pixels.